VET-004 three-way tubular furnace high vacuum molecular pump unit is specially designed for multi-station material processing and vacuum environment testing. It integrates a 600L/S high-efficiency molecular pump and three independent tubular furnaces. It supports ≤1.5×10⁻⁵Pa ultimate vacuum and 1200℃ high temperature collaborative operation. It is suitable for high vacuum process research and development and production in the fields of semiconductors, new energy, nanomaterials, etc.