VET-004 three-way tubular furnace high vacuum molecular pump unit is specially designed for multi-station material processing and vacuum environment testing. It integrates a 600L/S high-efficiency molecular pump and three independent tubular furnaces. It supports ≤1.5×10⁻⁵Pa ultimate vacuum and 1200℃ high temperature collaborative operation. It is suitable for high vacuum process research and development and production in the fields of semiconductors, new energy, nanomaterials, etc.

VET-005 vacuum nitrogen filling device is an industrial-grade equipment that integrates efficient vacuum extraction and precise nitrogen filling. It supports ≤-100KPa ultimate vacuum and 0.7MPa stable nitrogen supply. It is equipped with a double-station independent control module and is suitable for electronic packaging, new energy batteries, pharmaceutical packaging and other scenarios with strict requirements on vacuum environment and inert gas protection.

VET-001 is an intelligent CNC vacuum unit designed for the vacuum engineering field. It is composed of a fast Roots pump (30L/S pumping rate) and a front-stage rotary vane mechanical vacuum pump (8L/S rate). The ultimate vacuum can reach 5×10⁻¹Pa. It is suitable for high-precision vacuum scenarios such as semiconductor manufacturing, laboratory vacuum environment simulation, vacuum coating, etc., and is the core equipment for vacuum engineering testing, R&D and production.

VET-007 thermal vacuum test system focuses on high-end fields such as aerospace and satellites, simulates the extreme environment of space, has 1×10⁻⁵Pa extreme vacuum and a wide temperature range of -180℃~200℃, and integrates solar simulation and infrared heating functions to provide a precise test environment for product reliability verification.

VET-003 split vacuum pre-pumping machine is specially designed for complex production line layout. It realizes space optimization and flexible installation through the separate control chassis. It is equipped with high-precision Pirani vacuum sensor, supports intelligent setting of vacuum degree, leak detection and free matching of pump body, and is suitable for efficient vacuum processing in multiple scenarios such as refrigeration, vacuum coating, and laboratories.