Intelligent Cnc Vacuum Unit 30l/S Pumping Rate 5×10⁻¹Pa Ultimate Vacuum

Intelligent Cnc Vacuum Unit 30l/S Pumping Rate 5×10⁻¹Pa Ultimate Vacuum

Product Introduction

VET-001 uses dual-pump combination technology and intelligent control system to achieve efficient and stable output of vacuum performance:

▎High-efficiency vacuum pumping system

Dual-pump linkage design: Roots pump (30L/S rate) and rotary vane pump (8L/S rate) run in series, with a maximum vacuum of 5×10⁻¹Pa, which is 40% more efficient than a single-pump system and meets the demanding scenarios with vacuum requirements of ≤10⁻¹Pa (such as electron beam welding and vacuum heat treatment).

Energy-saving mode: Intelligently judge vacuum load, only the rotary vane pump runs in the low vacuum stage, and the Roots pump is automatically started in the high vacuum stage, reducing energy consumption by 35% compared with traditional units.

▎Intelligent CNC system

Human-computer interaction: 7-inch Weilun/Omron touch screen (Chinese and English switch) displays 12 parameters such as vacuum, pumping rate, oil temperature, etc. in real time, and supports historical data curve tracing (storage period ≥30 days).

Automatic control: Equipped with a workpiece connection sensor, the system automatically starts within 0.5 seconds after detecting the load, and automatically releases pressure and stops after completing the test; supports custom program presets (such as segmented vacuuming and pressure holding time settings).

▎Multiple safety protections

Electrical protection: phase loss detection (response time < 0.1 seconds), motor overload protection (automatic shutdown at 1.2 times the rated current), vacuum pump oil temperature overheating warning (> 70℃ alarm).

Mechanical protection: The Roots pump has a built-in anti-return oil valve, which automatically isolates the system when shutting down to prevent oil vapor from contaminating the vacuum chamber; the fully enclosed stainless steel frame (IP54 protection level) is dust-proof and splash-proof.

▎Flexible expansion capability

Communication interface: RS485/Modbus TCP interface is reserved to support PLC and SCADA system docking to achieve remote monitoring (such as real-time vacuum warning and remote fault diagnosis).

Pipeline configuration: 2 DN16 vacuum pipelines are standard (expandable to 4), suitable for KF/QF flange interface, and compatible with quick connection of vacuum chambers of different specifications.

Product Features

• Roots pump + rotary vane pump combination, 30L/S pumping rate, 5×10⁻¹Pa ultimate vacuum, suitable for high vacuum and high pumping speed dual requirements
• Touch screen + PLC fully automatic control, support 10 sets of custom program storage, parameter setting efficiency increased by 60%
• Triple electrical protection for phase loss/overload/oil temperature, anti-oil return mechanical design, to ensure 7×24 hours of continuous operation safety
• Modbus protocol compatible, can be connected to the factory MES system to achieve cluster management and data traceability of vacuum equipment
• 2-way expandable vacuum pipeline, support DN16-DN50 flange interface, compatible with semiconductor, laboratory and other multi-scenario equipment

International reference standard

• ISO 3668:2017 "Method for measuring performance of vacuum pumps" (Clause 5 pumping rate; Clause 6 ultimate pressure).
• GB/T 16530-2020 "Roots Vacuum Pump" (Section 5.1 Noise Limit; Section 5.2 Vibration Amplitude).
• IEC 60204-1:2018 "Electrical Safety of Machinery - Electrical Equipment" (Clause 8 Control Circuit; Clause 12 Overload Protection).
• ATEX 2014/34/EU "Explosion-Proof Directive" (Applicable to customized models for flammable and explosive environments)

Technical Parameters

Test objects and inspection items

Test objects:

• vacuum coating equipment (such as magnetron sputtering chamber), semiconductor wafer manufacturing equipment (photoresist coating vacuum chamber), laboratory vacuum drying oven/distillation device, vacuum packaging machine, vacuum freezing equipment.

Inspection items:

• Vacuum performance: pumping rate (30m³/h@standard atmospheric pressure), ultimate vacuum degree (5×10⁻¹Pa), pressure rise rate (≤5Pa/min).
• System compatibility: multi-pipeline synchronous vacuuming efficiency, flange interface leakage rate (helium mass spectrometry detection ≤1×10⁻⁹Pa・m³/s).
• Long-term stability: vacuum degree fluctuation (≤±5%) after 8 hours of continuous operation, Roots pump temperature rise (≤20℃).
• Energy saving: no-load power consumption (≤1.5kW), load power consumption curve (vacuum degree-power relationship).
• Safety performance: electrical insulation resistance (≥10MΩ), grounding continuity (≤0.1Ω), emergency shutdown response time (≤2 seconds).