High Performance Roots Dry Screw Vacuum Unit With 150m³/H Pumping Speed Oil-Free Class 5 Cleanroom Compatibility

High Performance Roots Dry Screw Vacuum Unit With 150m³/H Pumping Speed Oil-Free Class 5 Cleanroom Compatibility

Product Introduction

Roots + dry screw vacuum unit VEAT-005 integrates ZJY Roots pump (main pump) and dry screw pump (foreline pump). The pumping rate is up to 150m³/h under 10Pa working conditions. It has dry oil-free cleaning performance, is suitable for Class 5 clean rooms, and realizes closed-loop recovery of waste gas.

Dual pump synergistic advantages: Roots pump specializes in high vacuum section (10⁻²～10Pa), dry screw pump guarantees low vacuum start-up (10²～10⁵Pa), and the pumping rate under 10Pa working conditions is 150m³/h, which is 40% higher than that of a single screw pump.

Dry oil-free characteristics: The foreline pump adopts dry screw design and oil-free lubrication to prevent oil mist from contaminating the pumped material and meet Class 5 clean room standards.

Pollution closed-loop measures: standard air inlet filter (≥5μm particle interception rate 99%) and buffer gas tank to reduce foreign matter wear; integrated waste gas recovery module, solvent recovery rate ≥95%, in line with pharmaceutical/chemical environmental protection regulations.

The system is pre-installed with switch box and intelligent PLC, and the whole system is debugged in the factory. It only needs to "connect the power and process interface" to be put into operation on site, shortening the debugging cycle by 60%.

Comply with international standards:

ISO 21360:2018: Pumping rate deviation ≤±5%, noise ≤85dB (A)

GB/T 3216-2016: Ultimate vacuum ≤10⁻¹Pa, volumetric efficiency ≥90%

ISO 14644-1:2015: Exhaust dust content ≤10⁵ particles/m³ (level 5)

GB 150-2011: Withstand pressure ≥1.6MPa, leakage rate ≤10⁻⁴mbar・L/s

Technical Parameters