Roots Vacuum Pump Veat-003 1200 M³/H & Ultimate Vacuum 0.05pa Vacuum Engineering Application TestSolution

Roots Vacuum Pump Veat-003 1200 M³/H & Ultimate Vacuum 0.05pa Vacuum Engineering Application TestSolution

Product Introduction

• VEAT-003 adopts dual-rotor synchronous counter-rotation technology, combined with variable frequency drive and optimized rotor geometry design, which significantly improves the vacuuming efficiency and shortens the vacuuming time by 20%. Its intelligent interface supports real-time condition monitoring (Condition Monitoring), is compatible with vertical/horizontal installation, and is suitable for a variety of application scenarios from rough vacuum to fine vacuum (atmospheric pressure to 10⁻³ hPa), such as electron beam welding, vacuum furnaces, freeze drying and semiconductor wafer processing.

Product Features

• High efficiency and energy saving: IE4 high-efficiency motor and lightweight rotor design, energy consumption is reduced by 50%, and heat generation is reduced by 30%.
• Intelligent control: integrated inverter and IoT interface, support remote monitoring and adaptive working condition adjustment, improve system availability.
• Low maintenance cost: oil-free design + dynamic seal optimization, maintenance cycle up to 4 years, leakage rate as low as 1×10⁻⁶ Pa·m³/s.
• High reliability: cast iron rotor and precision transmission system, corrosion-resistant materials are optional, suitable for harsh industrial environments.
• Quiet and environmentally friendly: noise ≤63 dB(A), in line with ISO noise standards, suitable for medical and laboratory scenarios.

International reference standards

• ISO 21360: Vacuum pump performance test specification.
• SEMI S2/S8: Safety and environmental standards for semiconductor equipment.
• DIN ISO 9001: Quality management system certification.
• ANSI/UL 1203: Explosion-proof and electrical safety standards.
• IEC 60034-30: Motor energy efficiency level (IE4).

Product Uses

• Semiconductor manufacturing: wafer coating, vacuum welding, plasma cleaning.
• Medical equipment: freeze drying, aseptic packaging, vacuum sterilization.
• Environmental protection engineering: waste gas treatment, vacuum distillation, wastewater degassing.
• Food industry: vacuum packaging, material transportation, deoxygenation and preservation.
• Scientific research experiments: high vacuum simulation, wind tunnel testing, material analysis.

Test objects and test items

Test objects:

• Semiconductor wafers, electronic components, vacuum furnace chambers
• Medical packaging materials, food processing containers, environmentally friendly reactors

Test items:

• Vacuum stability (below 0.05 Pa)
• Leakage rate verification (≤1×10⁻⁶ Pa·m³/s)
• Pressure resistance (maximum 10⁴ Pa pressure difference)
• Energy efficiency (IE4 standard verification)
• Noise and vibration (compliant with ISO 3744)

Technical Parameters