VET-001 is an intelligent CNC vacuum unit designed for the vacuum engineering field. It is composed of a fast Roots pump (30L/S pumping rate) and a front-stage rotary vane mechanical vacuum pump (8L/S rate). The ultimate vacuum can reach 5×10⁻¹Pa. It is suitable for high-precision vacuum scenarios such as semiconductor manufacturing, laboratory vacuum environment simulation, vacuum coating, etc., and is the core equipment for vacuum engineering testing, R&D and production.