Vacuum Chamber Helium Leak Detection System

Detection Process:

I. Scanning of Workpiece

Utilize a specialized barcode scanner to accurately scan the barcode or QR code on the workpiece.

Upon successful scanning, the computer interface will instantly display the barcode data captured, ensuring accuracy and traceability of information.

II. Workpiece Installation and Initiation of Inspection

Precisely place the workpiece into the dedicated fixture inside the inspection chamber, ensuring stability and preventing movement.

Close the vacuum chamber and initiate the pre-set inspection cycle program to ensure the detection process follows the established sequence.

III. Chamber Inspection

Evacuate the vacuum chamber to detect any potential large leaks.

If no large leaks are detected, proceed to the next step in the inspection process; otherwise, the system will automatically sound an alarm and terminate the inspection.

IV. Evacuation of Workpiece

Evacuate the workpiece to reach the preset vacuum level.

This step aims to remove air and other impurities from the workpiece, preparing it for subsequent inspections.

V. Inspection for Large Leaks in Workpiece

Fill the workpiece with nitrogen gas and continuously monitor the changes in sensor values.

If the drop in sensor values does not exceed the preset limit, it indicates that there are no large leaks in the workpiece, and the inspection can continue; otherwise, the system will sound an alarm and end the inspection.

VI. Background Suppression in Vacuum Chamber

During the inspection process, to ensure accuracy, it is necessary to detect the background signal within the vacuum chamber.

If the detected background signal is too high, the system will perform suppression processing to eliminate its impact on the inspection results.

VII. Helium Filling and Inspection for Micro-Leaks in Workpiece

Fill the workpiece with helium gas to the preset pressure level to detect any potential micro-leaks.

Utilize a high-precision leak detector to monitor the helium signal inside the workpiece.

If the helium signal detected by the leak detector exceeds the preset limit, it indicates the presence of micro-leaks in the workpiece, and the micro-leak indicator light will illuminate; otherwise, the qualified indicator light will turn on, and the system will automatically mark the workpiece.

VIII. Recovery of Helium and Conclusion

After the inspection is complete, recover the helium gas within the vacuum chamber to ensure efficient utilization of resources.

Once the recovery is finished, evacuate the air inside the vacuum chamber to the preset vacuum level.

Open the vacuum chamber and carefully remove the workpiece. This concludes the entire workpiece inspection process.

Product Parameters: